Cleanroom Metrology Controller
SkillDev toolsNanofabrication metrology skill for process control with CD-SEM, ellipsometry, and profilometry
Instructions available. Your AI can read the instructions. Execution depends on the setup they require.
Account requirements not reviewed. Check the skill instructions before use; ahel provides instructions and does not run this skill.
Add ahel to your AI once: Claude, ChatGPT, Cursor, Claude Code or Codex. Then ask it to use this.
Then ask your AI: use the Cleanroom Metrology Controller skill
What this skill tells your AI
The instructions your AI receives, as published by a5c-ai/babysitter in library/specializations/domains/science/nanotechnology/skills/cleanroom-metrology-controller/SKILL.md and read by ahel’s review.
Purpose
The Cleanroom Metrology Controller skill provides comprehensive in-line metrology for nanofabrication process control, enabling precise measurement and monitoring of critical dimensions, film thicknesses, and pattern quality.
Capabilities
- CD-SEM measurement recipes
- Spectroscopic ellipsometry analysis
- Film thickness mapping
- Surface profilometry
- Defect inspection
- Overlay measurement
Usage Guidelines
Metrology Control
-
CD-SEM Measurements
- Develop automated recipes
- Calibrate against reference
- Track process variation
-
Ellipsometry
- Select appropriate model
- Map thickness uniformity
- Characterize optical constants
-
Defect Inspection
- Set detection thresholds
- Classify defect types
- Track yield trends
Process Integration
- All fabrication processes
- Analysis Pipeline Validation
Input Schema
{
"measurement_type": "cd_sem|ellipsometry|profilometry|defect",
"target_parameter": "string",
"wafer_map": {"sites": "number", "pattern": "string"},
"specification": {
"target": "number",
"tolerance": "number"
}
}
Output Schema
{
"measurements": [{
"site": "string",
"value": "number",
"unit": "string"
}],
"statistics": {
"mean": "number",
"std_dev": "number",
"range": "number"
},
"uniformity": "number (%)",
"pass_fail": "boolean",
"trending_data": {"dates": [], "values": []}
}
Signals
- GitHub stars
- 2k
- Forks
- 112
- Last commit
- Sep 2026
Advanced
- Item type
- skill
- Key
cleanroom-metrology-controller- Source
- github.com/a5c-ai/babysitter