CVD-PVD Process Controller

SkillDev tools

Chemical/Physical Vapor Deposition skill for thin film and nanostructure deposition optimization

Instructions available. Your AI can read the instructions. Execution depends on the setup they require.

Add ahel to your AI once: Claude, ChatGPT, Cursor, Claude Code or Codex. Then ask it to use this.

Then ask your AI: use the CVD-PVD Process Controller skill

What this skill tells your AI

The instructions your AI receives, as published by a5c-ai/babysitter in library/specializations/domains/science/nanotechnology/skills/cvd-pvd-process-controller/SKILL.md and read by ahel’s review.

Purpose

The CVD-PVD Process Controller skill provides comprehensive vapor deposition process control for thin film and nanostructure fabrication, enabling optimized growth conditions for various material systems.

Capabilities

  • CVD precursor chemistry selection
  • Temperature and pressure optimization
  • Plasma-enhanced CVD protocols
  • PVD sputtering/evaporation control
  • Film stress management
  • Rate and uniformity optimization

Usage Guidelines

Deposition Process Control

  1. CVD Optimization

    • Select precursor chemistry
    • Optimize flow rates
    • Control temperature profile
  2. PVD Control

    • Optimize sputter power
    • Control deposition rate
    • Manage film stress
  3. Quality Assurance

    • Monitor thickness in-situ
    • Characterize composition
    • Verify stoichiometry

Process Integration

  • Thin Film Deposition Process Optimization
  • Nanodevice Integration Process Flow

Input Schema

{
  "deposition_type": "cvd|pecvd|sputtering|evaporation",
  "material": "string",
  "target_thickness": "number (nm)",
  "substrate": "string",
  "quality_requirements": {
    "uniformity": "number (%)",
    "stress": "string (tensile|compressive|neutral)"
  }
}

Output Schema

{
  "process_parameters": {
    "temperature": "number (C)",
    "pressure": "number (mTorr)",
    "power": "number (W)",
    "gas_flows": [{"gas": "string", "flow": "number (sccm)"}]
  },
  "deposition_rate": "number (nm/min)",
  "uniformity": "number (%)",
  "film_stress": "number (MPa)",
  "composition": [{"element": "string", "fraction": "number"}]
}

Signals

GitHub stars
2k
Forks
112
Last commit
Sep 2026
Advanced
Item type
skill
Key
cvd-pvd-process-controller
Source
github.com/a5c-ai/babysitter